![hkmg process flow](https://host.easylife.tw/pics/201212/Czech22_IronGate/IMG_2727.jpg)
由CQin著作·2013·被引用1次—Inthispaper,aprocesschallengeofintegratingDualStressLiner.(DSL)(1)-(2)intogate-lastHigh-k/MetalGate(HKMG)flowis.,ProcessflowofNSFETconsideringHKMGwithgate-lastprocess.(a)and(b)AfterfinformationbasedonSi/SiGestack,(c)-(e)...
Process flow of NSFET considering HKMG with gate
- metal gate
- metal gate process flow
- metal gate好處
- hkmg process flow
- 28nm process flow
- metal gate台積電
- CMOS polysilicon
- hk metal gate
- metal gate material
- metal gate製程
- metal work function table
- metal gate台積電
- high k metal gate work function
- Why metal gate
- metal gate製程
- hkmg process flow
- metal gate好處
- high k metal gate process flow
- metal gate work function
- metal gate半導體
- hk metal gate
- hkmg process flow
- high k metal gate process
- hkmg process flow
- metal gate work function
ProcessflowofNSFETconsideringHKMGwithgate-lastprocess.(a)and(b)AfterfinformationbasedonSi/SiGestack,(c)-(e)innerspacerandS/Depitaxy ...
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